Case: Temperature sensor
DEVICE DEMO WITH DALP® TEMPERATURE SENSOR
THE PROBLEM
Temperature sensors integrated directly on the chip implies:
- more fabrication steps
- higher costs
- possibly incompatible fabrication processes between device and sensor
- increased fabrication failure risks
OUR SOLUTION
With ATLANT3D Technology, we can pattern directly a Platinum temperature sensor right next to or integrated into the device itself, what is called chip surgery.
We can provide very thin Pt layers, resulting in a more sensitive temperature sensor.
Below: Microscope image of our directly patterned sensor
Straight line Platinum sensor of ~45 nm thickness.
Contacted for testing using evaporated Au pads and Au wire bonding.
RESULTS
We developed Platinum sensors on flat surfaces with different thicknesses and measured their sensitivity and Temperature coefficient of resistivity (TCR), showcasing performance improvements compared to state-of-the-art sensors and Pt100 wire.
Above: Printed Pt sensor sensitivity compared to standard sensors
